EUV Lithography


  • Tytuł: EUV Lithography
  • Autor: R. Refinetti
  • Wydawnictwo: John Wiley & Sons
  • Data wydania: 2009
  • Słowa kluczowe:
  • Kategorie: elektryka i elektronika / electrics & electronics
  • ISBN: 978-0-470-47155-5
  • Opis: This is an edited volume with contributions of he world's leading extreme ultraviolet lithography (EUVL) researchers. The Editor has led research into EUVL at Sematech Inc and is currently the president of EUVL Inc. <br><br> Interest in EUVL technology continues to increase, and this volume provides the foundation required for understanding and applying this exciting technology.

    • Kup książkę: EUV Lithography


    EUV Lithography - R. Refinetti

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